Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7982466 | Inspection method for semiconductor memory | Tomohiro Takamatsu, Yoshinori Obata | 2011-07-19 |
| 7518173 | Semiconductor device having ferroelectric capacitor and its manufacture method | Mitsushi Fujiki, Kazutoshi Izumi, Naoya Sashida, Aki Dote | 2009-04-14 |
| 7390678 | Method for fabricating semiconductor device | Wensheng Wang, Takashi Ando | 2008-06-24 |
| 7338815 | Semiconductor device manufacturing method | Hirotoshi Tachibana | 2008-03-04 |
| 7221015 | Semiconductor device and method of manufacturing the same | Takashi Ando, Jiro Miura, Akio Itoh, Junichi Watanabe, Kenkichi Suezawa | 2007-05-22 |
| 6913970 | Semiconductor device and method of manufacturing the same | Kenichi Inoue, Yoshinori Obata, Takeyasu Saito, Kaoru Saigoh, Naoya Sashida +5 more | 2005-07-05 |
| 6743647 | Semiconductor memory device manufacturing method | — | 2004-06-01 |
| 6710422 | Semiconductor device and method of manufacturing the same | Akio Itoh, Kazuaki Takai, Takeyasu Saito | 2004-03-23 |
| 6706540 | Method of manufacturing a semiconductor device with a hydrogen barrier layer | Yasutaka Ozaki, Kazuaki Takai | 2004-03-16 |
| 6570203 | Semiconductor device and method of manufacturing the same | Yasutaka Ozaki, Kazuaki Takai | 2003-05-27 |
| 6509593 | Semiconductor device and method of manufacturing the same | Kenichi Inoue, Yoshinori Obata, Takeyasu Saito, Kaoru Saigoh, Naoya Sashida +5 more | 2003-01-21 |
| 5779925 | Plasma processing with less damage | Koichi Hashimoto, Takeshi Kamata, Akihiro Hasegawa | 1998-07-14 |
| 5471115 | Method and apparatus for measuring electron density of plasma | — | 1995-11-28 |