Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977018 | Exposure data preparation method and exposure method | Kozo Ogino | 2011-07-12 |
| 6060717 | Charged particle beam exposure method and charged particle beam exposure apparatus therefor | Yasuo Manabe, Hiromi Hoshino | 2000-05-09 |