Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5192643 | Pattern-forming method and radiation resist for use when working this pattern-forming method | Akiko Kotachi | 1993-03-09 |
| 5153103 | Resist composition and pattern formation process | Akiko Kotachi | 1992-10-06 |
| 5104479 | Resist material for energy beam lithography and method of using the same | Akiko Kotachi, Yuko Nakamura | 1992-04-14 |
| 5087551 | Process for preparing of semiconductor device and pattern-forming coating solution used for this process | Yuko Nakamura | 1992-02-11 |
| 5068169 | Process for production of semiconductor device | Yuko Nakamura, Yukari Mihara | 1991-11-26 |
| 5066751 | Resist material for energy beam lithography and method of using the same | Akiko Kotachi, Yuko Nakamura | 1991-11-19 |
| 5019485 | Process of using an electrically conductive layer-providing composition for formation of resist patterns | Yuko Nakamura | 1991-05-28 |