Issued Patents All Time
Showing 51–52 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806992 | Micro mirror unit including mirror substrate and wiring substrate spaced by conductive spacer | Hiromitsu Soneda, Satoshi Ueda, Hisao Okuda, Ippei Sawaki, Osamu Tsuboi +3 more | 2004-10-19 |
| 6723659 | Micromirror unit fabrication method and micromirror unit made by the same | Yoshihiro Mizuno, Satoshi Ueda, Osamu Tsuboi, Ippei Sawaki, Hisao Okuda +1 more | 2004-04-20 |