Issued Patents All Time
Showing 26–50 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7903315 | Micro oscillating device | Osamu Tsuboi, Yoshihiro Mizuno, Hiromitsu Soneda, Hisao Okuda, Tsuyoshi Matsumoto | 2011-03-08 |
| 7903313 | Micro movable element | Yoshihiro Mizuno, Hisao Okuda, Hiromitsu Soneda, Tsuyoshi Matsumoto, Osamu Tsuboi | 2011-03-08 |
| 7893596 | Micro movable element and micro movable element array | Osamu Tsuboi, Yoshihiro Mizuno, Hisao Okuda, Hiromitsu Soneda, Tsuyoshi Matsumoto | 2011-02-22 |
| 7880951 | Micro oscillating device and micro oscillating device array | Osamu Tsuboi, Hiromitsu Soneda, Hisao Okuda, Yoshihiro Mizuno, Tsuyoshi Matsumoto | 2011-02-01 |
| 7871687 | Method of making microstructure device, and microstructure device made by the same | Yoshihiro Mizuno, Hisao Okuda, Hiromitsu Soneda, Tsuyoshi Matsumoto, Osamu Tsuboi +1 more | 2011-01-18 |
| 7833430 | Method for fabricating microstructure and microstructure | Xiaoyu Mi, Osamu Tsuboi, Masafumi Iwaki, Hisao Okuda, Hiromitsu Soneda +2 more | 2010-11-16 |
| 7751108 | Micro-actuation element provided with torsion bars | Osamu Tsuboi, Yoshihiro Mizuno, Satoshi Ueda, Ippei Sawaki, Hisao Okuda +2 more | 2010-07-06 |
| 7701155 | Method for driving micro-oscillating element having comb-teeth electrodes | Osamu Tsuboi, Hisao Okuda, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda +2 more | 2010-04-20 |
| 7550895 | Method for driving micro-oscillating element having comb-teeth electrodes | Osamu Tsuboi, Hisao Okuda, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda +2 more | 2009-06-23 |
| 7536068 | Micro movable element and optical switching device | Hiromitsu Soneda, Xiaoyu Mi, Hisao Okuda, Osamu Tsuboi, Satoshi Ueda | 2009-05-19 |
| 7476950 | Micro-oscillating element and method of making the same | Osamu Tsuboi, Hiromitsu Soneda, Satoshi Ueda | 2009-01-13 |
| 7459331 | Micro mirror unit and method of making the same | Yoshihiro Mizuno, Satoshi Ueda, Osamu Tsuboi, Ippei Sawaki, Hisao Okuda +2 more | 2008-12-02 |
| 7453182 | Micro oscillating element | Osamu Tsuboi, Hiromitsu Soneda, Satoshi Ueda, Ippei Sawaki | 2008-11-18 |
| 7439184 | Method of making comb-teeth electrode pair | Osamu Tsuboi, Hiromitsu Soneda, Satoshi Ueda | 2008-10-21 |
| 7324251 | Micro-actuation element provided with torsion bars | Osamu Tsuboi, Yoshihiro Mizuno, Satoshi Ueda, Ippei Sawaki, Hisao Okuda +2 more | 2008-01-29 |
| 7262541 | Micro-oscillation element incorporating springs | Mi Xiaoyu, Satoshi Ueda, Hisao Okuda, Osamu Tsuboi, Hiromitsu Soneda +2 more | 2007-08-28 |
| 7192879 | Method for manufacturing micro-structural unit | Osamu Tsuboi, Hisao Okuda, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda +2 more | 2007-03-20 |
| 7161274 | Micro-oscillation element having two rotational axes that are non-orthogonal to each other | Osamu Tsuboi, Hisao Okuda, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda +2 more | 2007-01-09 |
| 7145712 | Micro mirror unit and method of making the same | Yoshihiro Mizuno, Satoshi Ueda, Osamu Tsuboi, Ippei Sawaki, Hisao Okuda +2 more | 2006-12-05 |
| 7038830 | Micro-oscillation element | Osamu Tsuboi, Hisao Okuda, Hiromitsu Soneda, Satoshi Ueda, Ippei Sawaki +1 more | 2006-05-02 |
| 7033515 | Method for manufacturing microstructure | Yoshihiro Mizuno, Osamu Tsuboi, Hisao Okuda, Hiromitsu Soneda, Satoshi Ueda +2 more | 2006-04-25 |
| 6969629 | Method for manufacturing micro-structural unit | Osamu Tsuboi, Hisao Okuda, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda +2 more | 2005-11-29 |
| 6891650 | Micromirror unit fabrication method and micromirror unit made by the same | Yoshihiro Mizuno, Satoshi Ueda, Osamu Tsuboi, Ippei Sawaki, Hisao Okuda +1 more | 2005-05-10 |
| 6881649 | Method of making device chips collectively from common material substrate | Yoshihiro Mizuno, Hisao Okuda, Ippei Sawaki, Osamu Tsuboi, Yoshitaka Nakamura | 2005-04-19 |
| 6817725 | Micro mirror unit and method of making the same | Yoshihiro Mizuno, Satoshi Ueda, Osamu Tsuboi, Ippei Sawaki, Hisao Okuda +2 more | 2004-11-16 |