Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4345020 | Positive resist polymer composition and method of forming resist pattern | Yasuhiro Yoneda, Toshisuke Kitakohji | 1982-08-17 |
| 4276365 | Positive resist terpolymer composition and method of forming resist pattern | Yasuhiro Yoneda, Toshisuke Kitakohji | 1981-06-30 |
| 4273856 | Positive resist terpolymer composition and method of forming resist pattern | Yasuhiro Yoneda, Toshisuke Kitakohji | 1981-06-16 |
| 4267258 | Negative type deep ultraviolet resist | Yasuhiro Yoneda, Jiro Naito, Toshisuke Kitakohji | 1981-05-12 |