Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7906443 | Controlling oxygen precipitates in silicon wafers using infrared irradiation and heating | Hiroshi Kaneta | 2011-03-15 |
| 7648887 | Classification apparatus for semiconductor substrate, classification method of semiconductor substrate, and manufacturing method of semiconductor device | Toshiya Sato | 2010-01-19 |