Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7514355 | Multilayer interconnection structure and method for forming the same | Syuji Katase, Kouichi Suzuki, Kenji Chichii | 2009-04-07 |
| 7242095 | Semiconductor device having a dummy pattern | Seiji Makino, Takahisa Ito | 2007-07-10 |
| 6598185 | Pattern data inspection method and storage medium | Showgo Matsui, Kazuhiko Takahashi, Kunihiko Shiozawa, Yoshiharu Ootani, Syuzi Katase | 2003-07-22 |
| 5781656 | Method and apparatus for inspecting patterns composed of reticle data | Ichiro Hagino | 1998-07-14 |
| 5287290 | Method and apparatus for checking a mask pattern | Satoshi Akutagawa | 1994-02-15 |