Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7270920 | Fabrication method of a semiconductor device | — | 2007-09-18 |
| 7226866 | Etching method for making a reticle | Kiyoshi Ozawa | 2007-06-05 |
| 5175128 | Process for fabricating an integrated circuit by a repetition of exposure of a semiconductor pattern | Taiji Ema, Katsuyoshi Kobayashi, Masao Taguchi | 1992-12-29 |
| 5132252 | Method for fabricating semiconductor devices that prevents pattern contamination | Hidehiko Shiraiwa, Nobuhiro Takahashi, Shinichi Nomura | 1992-07-21 |