Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7663187 | Semiconductor device and method of fabricating the same | Takashi Saiki, Hiroyuki Ohta | 2010-02-16 |
| 7585739 | Semiconductor device and method of fabricating the same | Takashi Saiki, Hiroyuki Ohta | 2009-09-08 |
| 7321151 | Semiconductor device and method of fabricating the same | Takashi Saiki, Hiroyuki Ohta | 2008-01-22 |
| 6033134 | Resist developing apparatus used in process for production of semiconductor device | Takashi Maruyama, Tatsuo Chijimatsu, Koichi Kobayashi, Keiko Yano | 2000-03-07 |
| 5783367 | Process for production of semiconductor device and resist developing apparatus used therein | Takashi Maruyama, Tatsuo Chijimatsu, Koichi Kobayashi, Keiko Yano | 1998-07-21 |
| 5667923 | Charged particle beam exposure compensating proximity effect | — | 1997-09-16 |