Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5904609 | Polishing apparatus and polishing method | Yoshihiro Arimoto, Ko Nakamura | 1999-05-18 |
| 5621239 | SOI device having a buried layer of reduced resistivity | Hiroshi Horie, Yoshihiro Arimoto | 1997-04-15 |
| 5399233 | Method of and apparatus for manufacturing a semiconductor substrate | Maki Murazumi, Yoshihiro Arimoto | 1995-03-21 |