Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5310452 | Plasma process apparatus and plasma processing method | Masahiko Doki | 1994-05-10 |
| 5160397 | Plasma process apparatus and plasma processing method | Masahiko Doki | 1992-11-03 |
| 4891118 | Plasma processing apparatus | Masahiko Doki | 1990-01-02 |