Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE36006 | Metal selective polymer removal | Brynne K. Bohannon | 1998-12-22 |
| 5458724 | Etch chamber with gas dispersing membrane | Richard Novak, Eugene L. Haak | 1995-10-17 |
| 5348619 | Metal selective polymer removal | Brynne K. Bohannon | 1994-09-20 |
| 5169408 | Apparatus for wafer processing with in situ rinse | Rex L. Biggerstaff, Charles W. Skinner, Mark L. Jenson, James G. Kegley | 1992-12-08 |
| 4900395 | HF gas etching of wafers in an acid processor | Richard Novak | 1990-02-13 |
| 4857142 | Method and apparatus for controlling simultaneous etching of front and back sides of wafers | — | 1989-08-15 |