Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5169408 | Apparatus for wafer processing with in situ rinse | Charles W. Skinner, Daniel J. Syverson, Mark L. Jenson, James G. Kegley | 1992-12-08 |
| 4749440 | Gaseous process and apparatus for removing films from substrates | Robert S. Blackwood, L. Davis Clements, C. Rinn Cleavelin | 1988-06-07 |