Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500137 | Multilayer mirror for reflecting EUV radiation and method for producing the same | Philipp Naujok, Norbert Kaiser | 2022-11-15 |
| 7986455 | Thermally stable multilayer mirror for the EUV spectral range | Torsten Feigl, Nicolas Benoit, Nobert Kaiser | 2011-07-26 |
| 7920323 | Thermally stable multilayer mirror for the EUV spectral region | Nicolas Benoit, Torsten Feigl, Norbert Kaiser | 2011-04-05 |