Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7986455 | Thermally stable multilayer mirror for the EUV spectral range | Torsten Feigl, Nicolas Benoit, Sergiy Yulin | 2011-07-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7986455 | Thermally stable multilayer mirror for the EUV spectral range | Torsten Feigl, Nicolas Benoit, Sergiy Yulin | 2011-07-26 |