Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10940456 | Method for producing hydrogenated amorphous silicon-containing colloids and/or composite colloids and for encapsulating substances with hydrogenated amorphous silicon-containing composite colloids, hydrogenated amorphous silicon-containing colloids and/or composite colloids, substances encapsulated with silicon-containing composite layers, and use thereof | Andrew Paolo Cadiz Bedini, Benjamin Klingebiel, Stefan Haas, Jan Flohre, Chunguang Chen +1 more | 2021-03-09 |
| 9478384 | Electrode for producing a plasma, plasma chamber having said electrode, and method for analyzing or processing a layer or the plasma in situ | Stefan Muthmann, Aad Gordijn, Markus Huelsbeck, Dzmitry Hrunski | 2016-10-25 |
| 9234281 | Method for producing silicon layers | Stephan Wieber, Matthias Patz, Torsten Bronger, Michael Cölle | 2016-01-12 |
| 8664522 | Method for producing a thin-film solar cell by use of microcrystalline silicon and a layer sequence | Stefan Klein, Yaohua MAI, Friedhelm Finger | 2014-03-04 |
| 8110246 | Method for producing a thin-film solar cell by use of microcrystalline silicon and a layer sequence | Stefan Klein, Yaohua MAI, Friedhelm Finger | 2012-02-07 |