Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365978 | Diaphragm assembly for delimiting the coating region of a sputter source, and sputtering device | Markus Kress, Marco Seibert, Florian Schwarz | 2025-07-22 |
| 9478384 | Electrode for producing a plasma, plasma chamber having said electrode, and method for analyzing or processing a layer or the plasma in situ | Stefan Muthmann, Aad Gordijn, Reinhard Carius, Markus Huelsbeck | 2016-10-25 |