Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11435378 | MEMS-based nanoindentation force sensor with electro-thermal tip heating | Simon Muntwyler, David Beyeler | 2022-09-06 |
| 11307125 | MEMS nanoindenter chip with indenter probe and reference probe | David Beyeler, Simon Muntwyler | 2022-04-19 |
| 9575093 | System for the combined, probe-based mechanical and electrical testing of MEMS | Christoph Bolliger, Daniel Frost, David Beyeler, Simon Muntwyler | 2017-02-21 |
| 9535086 | Interface of a microfabricated scanning force sensor for combined force and position sensing | Simon Muntwyler | 2017-01-03 |
| 9046548 | System for mechanical characterization of materials and biological samples in the sub-millinewton force range | Simon Muntwyler | 2015-06-02 |
| 8984966 | Sub-millinewton capacitive MEMS force sensor for mechanical testing on a microscope | Simon Muntwyler, Wolfgang Dietze | 2015-03-24 |
| 7712366 | Multi-axis capacitive transducer and manufacturing method for producing it | Bradley Nelson, Yu Sun | 2010-05-11 |