Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11435378 | MEMS-based nanoindentation force sensor with electro-thermal tip heating | Felix Beyeler, Simon Muntwyler | 2022-09-06 |
| 11307125 | MEMS nanoindenter chip with indenter probe and reference probe | Simon Muntwyler, Felix Beyeler | 2022-04-19 |
| 10691080 | Computerised system | Anton Gunzinger, Martin Dorigatti, Philipp Stadelmann, Richard Huber | 2020-06-23 |
| 9575093 | System for the combined, probe-based mechanical and electrical testing of MEMS | Felix Beyeler, Christoph Bolliger, Daniel Frost, Simon Muntwyler | 2017-02-21 |