Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5814156 | Photoreactive surface cleaning | David J. Elliott | 1998-09-29 |
| 5669979 | Photoreactive surface processing | David J. Elliott, Francis M. Yans, Daniel K. Singer | 1997-09-23 |
| 5559338 | Deep ultraviolet optical imaging system for microlithography and/or microfabrication | David J. Elliott, David Shafer | 1996-09-24 |
| 5359388 | Microlithographic projection system | — | 1994-10-25 |
| 5070235 | Accumulated exposure detection with exposure terminating attenuator | — | 1991-12-03 |