Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742187 | RF capacitive coupled etch reactor | Jurgen Weichart | 2023-08-29 |
| 11469085 | Vacuum plasma workpiece treatment apparatus | Jurgen Weichart | 2022-10-11 |
| 11217434 | RF capacitive coupled dual frequency etch reactor | Jurgen Weichart | 2022-01-04 |