Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12025426 | Measuring device and method for determining the course of a bonding wave | Dominik Zinner, Jurgen Mallinger, Thomas Plach, Harald Rohringer, Jurgen Markus Suss | 2024-07-02 |
| 11865824 | Method and device for transferring a transfer layer | Venkata Raghavendra Subrahmanya Sarma Mokkapati, Thomas Uhrmann | 2024-01-09 |
| 11681228 | Method and apparatus for illuminating image points | Bernhard Thallner | 2023-06-20 |
| 11534868 | Device and method for separating a temporarily bonded substrate stack | Elisabeth Brandl, Thomas Uhrmann | 2022-12-27 |
| 11460777 | Method and device for exposure of photosensitive layer | Bernhard Thallner | 2022-10-04 |
| 11209739 | Method and apparatus for aligning two optical subsystems | — | 2021-12-28 |
| 11040525 | Method for embossing micro-structures and/or nano-structures | Jozsef Krol | 2021-06-22 |
| 10852528 | Method and device for exposure of photosensitive layer | Bernhard Thallner | 2020-12-01 |
| 10656078 | Metrology device and metrology method | Martin Eibelhuber, Markus Heilig | 2020-05-19 |
| 10024741 | Measuring device and method for ascertaining a pressure map | Antun Peic | 2018-07-17 |