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Packaging structure of a microelectronic device having a hermeticity improved by a diffusion barrier layer |
Damien Saint-Patrice, Arnoldus Den Dekker, Marcel Giesen, Jean-Louis Pornin, Bruno Reig |
2020-01-14 |
| 10076035 |
Miniaturized multi-part component and method for producing same |
Marcel Giesen |
2018-09-11 |
| 9991873 |
Microacoustic component and method for the production thereof |
Bernhard Bader |
2018-06-05 |
| 9908773 |
Method for packaging a microelectronic device in a hermetically sealed cavity and managing the atmosphere of the cavity with a dedicated hole |
Damien Saint-Patrice, Arnoldus Den Dekker, Marcel Giesen, Florent Greco, Jean-Louis Pornin +1 more |
2018-03-06 |
| 9876158 |
Component comprising stacked functional structures and method for producing same |
Thomas Metzger |
2018-01-23 |
| 9807917 |
Electronic component and method for producing the electronic component |
— |
2017-10-31 |
| 9590163 |
Electronic component and method for producing the electronic component |
Edgar Schmidhammer |
2017-03-07 |
| 9199839 |
Method of hermetically sealing a hole with a fuse material |
Jean-Louis Pornin, Arnoldus Den Dekker, Marcel Giesen, Florent Greco, Bruno Reig +1 more |
2015-12-01 |
| 9071222 |
Method for forming an electrode |
Andreas Link, Rainer Braun |
2015-06-30 |
| 8940359 |
Method of producing a microacoustic component |
Christoph Eggs, Werner Ruile, Guenter Scheinbacher, Siegfried Menzel, Mario Spindler |
2015-01-27 |
