Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8253422 | Method of manufacture of wafers using an electro-chemical residue sensor (ECRS) | Bert M. Vermeire | 2012-08-28 |
| 8120368 | Method of monitoring the clean/rinse/dry processes of patterned wafers using an electro-chemical residue sensor (ECRS) | Bert M. Vermeire | 2012-02-21 |
| 7932726 | Method of design optimization and monitoring the clean/rinse/dry processes of patterned wafers using an electro-chemical residue sensor (ECRS) | Bert M. Vermeire | 2011-04-26 |
| 7489141 | Surface micro sensor and method | Bert M. Vermeire | 2009-02-10 |
| 7332902 | Micro sensor for electrochemically monitoring residue in micro channels | Bert M. Vermeire | 2008-02-19 |
| 7317317 | Shielded micro sensor and method for electrochemically monitoring residue in micro features | Bert M. Vermeire | 2008-01-08 |
| 7202175 | Method and apparatus for treating a substrate surface by bubbling | Kon-Tsu Kin, Chiou-Mei Chen, Jen-Chung Lou, Ching-Yi Hsu | 2007-04-10 |
| 6991733 | Process for removing organics from ultrapure water | Kon-Tsu Kin, Pei-Lin Chang, Hsiao-Fen Cheng | 2006-01-31 |
| 5637544 | Reactive membrane for filtration and purification of gases of impurities and method utilizing the same | — | 1997-06-10 |
| 5635148 | Reactive membrane for filtration and purification of gases of impurities and method utilizing the same | — | 1997-06-03 |
| 5302356 | Ultrapure water treatment system | Robert Andrew Governal | 1994-04-12 |
| 5196380 | Reactive membrane for filtration and purification of gases of impurities | — | 1993-03-23 |
| 4346557 | Incineration-cleanable composite diesel exhaust filter and vehicle equipped therewith | Louis Hegedus | 1982-08-31 |
| 4329844 | Diesel exhaust filter-incinerator | Louis Hegedus | 1982-05-18 |