Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6843894 | Cathode current control system for a wafer electroplating apparatus | Robert W. Berner, Joseph J. Fatula, Jr., Robert Hitzfeld, Andrew Chiu | 2005-01-18 |
| 6627051 | Cathode current control system for a wafer electroplating apparatus | Robert W. Berner, Joseph J. Fatula, Jr., Robert Hitzfeld, Andrew Chiu | 2003-09-30 |
| 6500316 | Apparatus for rotary cathode electroplating with wireless power transfer | Joseph J. Fatula, Jr., Robert Hitzfeld, Guillermo Prada-Silva, Andrew Chiu, Rainer Schieferstein | 2002-12-31 |
| 6437472 | Apparatus for wireless transfer of power to a rotating element | Joseph J. Fatula, Jr., Robert Hitzfeld, Guillermo Prada-Silva, Andrew Chiu, Rainer Schieferstein | 2002-08-20 |
| 6322674 | Cathode current control system for a wafer electroplating apparatus | Robert W. Berner, Joseph J. Fatula, Jr., Robert Hitzfeld, Andrew Chiu | 2001-11-27 |
| 6278210 | Rotary element apparatus with wireless power transfer | Joseph J. Fatula, Jr., Robert Hitzfeld, Guillermo Prada-Silva, Andrew Chiu, Rainer Schieferstein | 2001-08-21 |