Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837115 | Pre-treatment composition before etching SiGe and method of fabricating semiconductor device using the same | Soojin Kim, Hyo-Sun Lee, Jung-Min Oh, Hyosan Lee, Donghyun Kim +2 more | 2020-11-17 |