YH

Yoshio Hatada

EB Ebara: 2 patents #752 of 1,611Top 50%
Overall (All Time): #2,285,098 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
5395474 Apparatus and method for etching semiconductor wafer Hidenao Suzuki, Tatsuya Nishimura 1995-03-07
5243189 Ion neutralizer Kazutoshi Nagai, Tohru Satake, Hideaki Hayashi 1993-09-07