Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8223329 | Endpoint detection device for realizing real-time control of plasma reactor, plasma reactor with endpoint detection device, and endpoint detection method | Kwang Hoon Han, Kee Hyun Kim, Weon Mook Lee, Kyounghoon Han, Heeyeop Chae | 2012-07-17 |
| 8049872 | Endpoint detection device for realizing real-time control of plasma reactor, plasma reactor with endpoint detection device, and endpoint detection method | Kwang Hoon Han, Kee Hyun Kim, Weon Mook Lee, Kyounghoon Han, Heeyeop Chae | 2011-11-01 |
| 6653194 | Method for forming contact hole in semiconductor device | — | 2003-11-25 |