Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8481142 | System and method for monitoring chloride content and concentration induced by a metal etch process | Thanas Budri, Thomas Francis, David Tucker, Sergei Drizlikh | 2013-07-09 |
| 5356828 | Method of forming micro-trench isolation regions in the fabrication of semiconductor devices | Ellen G. Piccioli | 1994-10-18 |