Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6137156 | Semiconductor device employing silicon nitride layers with varied hydrogen concentration | Yuji Ichikawa, Yasushi Tanaka, Yasuo Souki, Akira Kuroyanagi, Hirohito Shioya | 2000-10-24 |
| 5830771 | Manufacturing method for semiconductor device | Shigemitsu Fukatsu, Akira Kuroyanagi | 1998-11-03 |
| 5714408 | Method of forming silicon nitride with varied hydrogen concentration | Yuji Ichikawa, Yasushi Tanaka, Yasuo Souki, Akira Kuroyanagi, Hirohito Shioya | 1998-02-03 |