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Semiconductor device and manufacturing method for the same |
Yuuki Inagaki, Yasuhiro Kitamura |
2019-08-27 |
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Semiconductor device capable of restricting coil extension direction and manufacturing method thereof |
Shinji Yoshihara, Yasuhiro Kitamura, Junji Oohara |
2013-12-17 |
| 8471363 |
Semiconductor device and method of manufacturing the same |
Yasuhiro Kitamura |
2013-06-25 |
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Semiconductor device manufacturing method |
Junji Oohara |
2013-06-11 |
| 8256289 |
Angular rate sensor |
Kazuhiko Kano, Akihiko Teshigahara, Kazuki Arakawa |
2012-09-04 |
| 7900512 |
Angular rate sensor |
Kazuhiko Kano, Akihiko Teshigahara, Kazuki Arakawa |
2011-03-08 |
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Acceleration sensor and method for manufacturing the same |
Yukihiro Takeuchi, Kenichi Yokoyama |
2008-09-02 |
| 7214625 |
Method for manufacturing movable portion of semiconductor device |
Junji Oohara, Hiroshi Muto, Kazuhiko Sugiura, Tsuyoshi Fukada, Yukihiro Takeuchi |
2007-05-08 |
| 7105902 |
Optical device having movable portion and method for manufacturing the same |
Kazuhiko Kano, Tetsuo Y Shioka |
2006-09-12 |
| 6718824 |
Semiconductor dynamic quantity detecting sensor and manufacturing method of the same |
Takeshi Ito, Tsuyoshi Fukada, Hirofumi Higuchi |
2004-04-13 |
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Capacitance type humidity sensor and manufacturing method of the same |
Inao Toyoda, Hajime Matsuhashi |
2003-06-17 |
| 6549015 |
Pair of electrodes for detecting acidity or basicity of oil |
Kazuyuki Horie, Kiwamu Naito, Hayaki Teramoto, Tatsuhiko Nonoyama, Takahiko Yoshida +1 more |
2003-04-15 |
| 6287885 |
Method for manufacturing semiconductor dynamic quantity sensor |
Hiroshi Muto, Tsuyoshi Fukada, Masakazu Terada, Hiroshige Sugito, Masakazu Kanosue +8 more |
2001-09-11 |
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Angular velocity sensor |
Takeshi Itou, Yasushi Matsuhiro, Muneo Yorinaga, Yoshimi Yoshino, Kazuhiko Miura |
2000-09-19 |
| 6116087 |
Angular velocity sensor |
Takayuki Ishikawa, Muneo Yorinaga, Yoshimi Yoshino |
2000-09-12 |
| 6010919 |
Method for manufacturing semiconductor devices by use of dry etching |
Yasushi Matsuhiro, Yoshimi Yoshino |
2000-01-04 |
| 5575887 |
Plasma etching method and device manufacturing method thereby |
Takahiko Yoshida, Muneo Yorinaga, Tsuyoshi Fukada |
1996-11-19 |
| 5536364 |
Process of plasma etching silicon |
Takahiko Yoshida, Muneo Yorinaga, Yoshimi Yoshino |
1996-07-16 |