Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6750152 | Method and apparatus for electrically testing and characterizing formation of microelectric features | Steven E. Staller, John E. Freeman, Troy Chase, Robert Lawrence Healton | 2004-06-15 |
| 6718826 | Balanced angular accelerometer | Seyed R. Zarabadi, Ian D. Jay, Jack D. Johnson, Tracy Adam Noll | 2004-04-13 |
| 6685844 | Deep reactive ion etching process and microelectromechanical devices formed thereby | David B. Rich | 2004-02-03 |
| 6666092 | Angular accelerometer having balanced inertia mass | Seyed R. Zarabadi, Ian D. Jay, Jack D. Johnson, Tracy Adam Noll | 2003-12-23 |
| 6500348 | Deep reactive ion etching process and microelectromechanical devices formed thereby | Troy Chase | 2002-12-31 |
| 6428713 | MEMS sensor structure and microfabrication process therefor | Steven E. Staller, John E. Freeman, Troy Chase, Robert Lawrence Healton, David B. Rich | 2002-08-06 |
| 6393914 | Angular accelerometer | Seyed R. Zarabadi, William J. Baney | 2002-05-28 |
| 5919004 | Method and apparatus for protective encapsulation of structural members | — | 1999-07-06 |
| 5829920 | Method of testing wrapped submerged piling for infestation | — | 1998-11-03 |
| 5531121 | Micromachined integrated pressure sensor with oxide polysilicon cavity sealing | Douglas Ray Sparks, Ronald E. Brown, Robert Lawrence Healton | 1996-07-02 |
| 5427975 | Method of micromachining an integrated sensor on the surface of a silicon wafer | Douglas Ray Sparks, Ronald E. Brown, Robert Lawrence Healton | 1995-06-27 |
| 5213999 | Method of metal filled trench buried contacts | Douglas Ray Sparks, James M. Himelick | 1993-05-25 |
| 4882294 | Process for forming an epitaxial layer having portions of different thicknesses | — | 1989-11-21 |
| 4749441 | Semiconductor mushroom structure fabrication | Peter J. Schubert | 1988-06-07 |
| 4251181 | Implement coupling apparatus for boom-type vehicle | Edward R. Drott, Ralph E. Rathke | 1981-02-17 |