Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828172 | Process for a monolithically-integrated micromachined sensor and circuit | Abhijeet V. Chavan, James Logsdon, John C. Christenson, Robert K. Speck | 2004-12-07 |
| 6793389 | Monolithically-integrated infrared sensor | Abhijeet V. Chavan, James Logsdon, Han-Sheng Lee, David K. Lambert, Timothy A. Vas | 2004-09-21 |
| 6750521 | Surface mount package for a micromachined device | Hamid R. Borzabadi, Douglas Ray Sparks | 2004-06-15 |
| 5936164 | All-silicon capacitive pressure sensor | Douglas Ray Sparks, William J. Baney, Steven E. Staller, James Siekkinen | 1999-08-10 |
| 5879572 | Method of protecting silicon wafers during wet chemical etching | Joseph Keith Folsom, Johnna Lee Haller | 1999-03-09 |
| 5831162 | Silicon micromachined motion sensor and method of making | Douglas Ray Sparks, George JIANG, Mark B. Kearney | 1998-11-03 |
| 5721162 | All-silicon monolithic motion sensor with integrated conditioning circuit | Peter J. Schubert, Steven E. Staller, Mark B. Kearney | 1998-02-24 |
| 5706565 | Method for making an all-silicon capacitive pressure sensor | Douglas Ray Sparks, William J. Baney, Steven E. Staller, James Siekkinen | 1998-01-13 |
| 5413955 | Method of bonding silicon wafers at temperatures below 500 degrees centigrade for sensor applications | Han-Sheng Lee, Steven E. Staller | 1995-05-09 |
| 5385652 | Method of etching using a silver/silver oxide reference electrode | Su-Chee Simon Wang | 1995-01-31 |
| 5369057 | Method of making and sealing a semiconductor device having an air path therethrough | Han-Sheng Lee, Steven E. Staller, James Logsdon | 1994-11-29 |
| 5177331 | Impact detector | David B. Rich | 1993-01-05 |