Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6889105 | Scheduling method and program for a substrate processing apparatus | Jun Kawai, Kiyoshi Akao, Osamu Horiguchi | 2005-05-03 |
| 6807452 | Scheduling method and program for a substrate processing apparatus | Jun Kawai | 2004-10-19 |