Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6889105 | Scheduling method and program for a substrate processing apparatus | Nobuhiro Mukuta, Jun Kawai, Osamu Horiguchi | 2005-05-03 |
| 4919073 | Surface treatment method and apparatus thereof | Atsuo Kobayashi, Takuma Yamada | 1990-04-24 |
| 4830888 | Surface treatment method and apparatus thereof | Atsuo Kobayashi, Takuma Yamada | 1989-05-16 |