Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6879393 | Defect inspection apparatus for phase shift mask | Yasuhiro Koizumi, Shigeru Noguchi, Katsuhide Tsuchiya | 2005-04-12 |
| 6803584 | Electron beam control device | Kazuaki Yamamoto | 2004-10-12 |
| 5757019 | Pattern drawing apparatus | Kazuaki Yamamoto | 1998-05-26 |