Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7367010 | Designing method and device for phase shift mask | Nobuhito Toyama | 2008-04-29 |
| 7287240 | Designing method and device for phase shift mask | Nobuhito Toyama, Yasutaka Morikawa | 2007-10-23 |
| 7067221 | Designing method and device for phase shift mask | Nobuhito Toyama | 2006-06-27 |