| 5936757 |
Thin film actuated mirror array |
Dong-Kuk Kim, Seok-Won Lee |
1999-08-10 |
| 5900998 |
Thin film actuated mirror array and method for the manufacture thereof |
Dong-Kuk Kim, Seok-Won Lee |
1999-05-04 |
| 5862002 |
Electrostrictive actuated mirror array and method for the manufacture thereof |
— |
1999-01-19 |
| 5861979 |
Array of thin film actuated mirrors having an improved optical efficiency and an increased performance |
Yong-Ki Min |
1999-01-19 |
| 5760947 |
Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof |
Dong-Kuk Kim, Yong-Ki Min |
1998-06-02 |
| 5701192 |
Thin film actuated mirror array and method of manufacturing the same |
Yong-Ki Min |
1997-12-23 |
| 5696618 |
Electrodisplacive actuated mirror array and method for the manufacture thereof |
Yong-Ki Min |
1997-12-09 |
| 5663830 |
Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof |
Yong-Ki Min |
1997-09-02 |
| 5661611 |
Thin film actuated mirror array and method for the manufacture thereof |
Dong-Kuk Kim, Seok-Won Lee |
1997-08-26 |
| 5636070 |
Thin film actuated mirror array |
Dong-Kuk Kim |
1997-06-03 |
| 5610757 |
Thin film actuated mirror array for use in an optical projection system |
Dong-Seon Yoon |
1997-03-11 |
| 5604623 |
Array of thin film actuated mirrors having an improved optical efficiency and method for the manufacture thereof |
Yong-Ki Min |
1997-02-18 |
| 5589084 |
Thin film actuated mirror array |
Gregory Um |
1996-12-31 |
| 5579179 |
Method for manufacturing an array of thin film actuated mirrors |
Young-Jun Choi |
1996-11-26 |
| 5481396 |
Thin film actuated mirror array |
Gregory Um |
1996-01-02 |