Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7329934 | Smooth metal semiconductor surface and method for making the same | — | 2008-02-12 |
| 6969684 | Method of making a planarized semiconductor structure | Yitzhak Gilboa, Steven Hedayati, Krishnaswamy Ramkumar | 2005-11-29 |
| 6828678 | Semiconductor topography with a fill material arranged within a plurality of valleys associated with the surface roughness of the metal layer | — | 2004-12-07 |
| 6822278 | Localized field-inducding line and method for making the same | — | 2004-11-23 |
| 6740588 | Smooth metal semiconductor surface and method for making the same | — | 2004-05-25 |
| 6566249 | Planarized semiconductor interconnect topography and method for polishing a metal layer to form wide interconnect structures | Anantha R. Sethuraman, Christopher A. Seams | 2003-05-20 |
| 6361415 | Employing an acidic liquid and an abrasive surface to polish a semiconductor topography | Anantha R. Sethuraman | 2002-03-26 |
| 6302766 | System for cleaning a surface of a dielectric material | Anantha R. Sethuraman | 2001-10-16 |
| 5972124 | Method for cleaning a surface of a dielectric material | Anantha R. Sethuraman | 1999-10-26 |