| 9624094 |
Hydrogen barriers in a copper interconnect process |
Shan Sun, Ali Keshavarzi, Thurman J. Rodgers |
2017-04-18 |
| 9548348 |
Methods of fabricating an F-RAM |
Shan Sun, Krishnaswamy Ramkumar, Kedar Patel |
2017-01-17 |
| 9514797 |
Hybrid reference generation for ferroelectric random access memory |
Fan Chu, Shan Sun, Alan D. DeVilbiss |
2016-12-06 |
| 9318693 |
Method for fabricating a damascene self-aligned ferroelectric random access memory (F-RAM) having a ferroelectric capacitor aligned with a three dimensional transistor structure |
John Cronin, Shan Sun |
2016-04-19 |
| 9240440 |
Method minimizing imprint through packaging of F-RAM |
Shan Sun, Robert Sommervold, Donald J. Verhaeghe |
2016-01-19 |
| 9006808 |
Eliminating shorting between ferroelectric capacitors and metal contacts during ferroelectric random access memory fabrication |
Shan Sun |
2015-04-14 |
| 8916434 |
Enhanced hydrogen barrier encapsulation method for the control of hydrogen induced degradation of ferroelectric capacitors in an F-RAM process |
Shan Sun |
2014-12-23 |
| 8842460 |
Method for improving data retention in a 2T/2C ferroelectric memory |
Shan Sun, Robert Sommervold, Donald J. Verhaeghe |
2014-09-23 |
| 8728901 |
Method for fabricating a damascene self-aligned ferroelectric random access memory (F-RAM) with simultaneous formation of sidewall ferroelectric capacitors |
Shan Sun, John Cronin |
2014-05-20 |
| 8552515 |
Method for fabricating a damascene self-aligned ferroelectric random access memory (F-RAM) device structure employing reduced processing steps |
Shan Sun, John Cronin |
2013-10-08 |
| 8518792 |
Method for fabricating a damascene self-aligned ferroelectric random access memory (F-RAM) having a ferroelectric capacitor aligned with a three dimensional transistor structure |
Shan Sun, John Cronin |
2013-08-27 |
| 8518791 |
Method for fabricating a damascene self-aligned ferroelectric random access memory (F-RAM) with simultaneous formation of sidewall ferroelectric capacitors |
Shan Sun, John Cronin |
2013-08-27 |
| 6853535 |
Method for producing crystallographically textured electrodes for textured PZT capacitors |
Glen Fox |
2005-02-08 |
| 5519566 |
Method of manufacturing ferroelectric bismuth layered oxides |
Stanley C. Perino |
1996-05-21 |
| 5426075 |
Method of manufacturing ferroelectric bismuth layered oxides |
Stanley C. Perino |
1995-06-20 |
| 5206788 |
Series ferroelectric capacitor structure for monolithic integrated circuits and method |
William Larson, Constance DeSmith |
1993-04-27 |