Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5527209 | Wafer polisher head adapted for easy removal of wafers | Jiro Kajiwara, Herbert W. Owens, Jr., Jan H. King | 1996-06-18 |
| 5443416 | Rotary union for coupling fluids in a wafer polishing apparatus | Jiro Kajiwara, Herbert W. Owens, Jr., Jan H. King | 1995-08-22 |