Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12022270 | MEMS microphone and preparation method therefor | Guoping Zhou, Xinwei Zhang, Changfeng Xia | 2024-06-25 |
| 10816903 | Photolithography method and system based on high step slope | — | 2020-10-27 |
| 9939724 | Photolithography method and system based on high step slope | — | 2018-04-10 |
| 9371224 | Silicon etching method | — | 2016-06-21 |