Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9006867 | Monitoring structure and monitoring method for silicon wet etching depth | Xinwei Zhang, Changfeng Xia, Wei Su | 2015-04-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9006867 | Monitoring structure and monitoring method for silicon wet etching depth | Xinwei Zhang, Changfeng Xia, Wei Su | 2015-04-14 |