Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8426233 | Methods of packaging microelectromechanical resonators | Kuolung Lei, Wanling Pan | 2013-04-23 |
| 7531424 | Vacuum wafer-level packaging for SOI-MEMS devices | — | 2009-05-12 |
| 6429034 | Method of making high aspect ratio features during surface micromachining | Norman Tien, J. Greg Couillard | 2002-08-06 |
| 6338249 | Electrothermally actuated vibromotor | Norman Tien | 2002-01-15 |