Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7229927 | Semiconductor processing silica soot abrasive slurry method for integrated circuit microelectronics | Charles Michael Darcangelo, Robert Sabia, Robert D. Sell, Ljerka Ukrainczyk | 2007-06-12 |
| 6616718 | Aqueous solution for colloidal polishing of silicate substrates | Charles Michael Darcangelo, Robert Sabia | 2003-09-09 |
| 6576380 | Extreme ultraviolet soft x-ray projection lithographic method and mask devices | Claude L. Davis, Jr., Kenneth Edward Hrdina, Robert Sabia | 2003-06-10 |
| 6465272 | Extreme ultraviolet soft x-ray projection lithographic method and mask devices | Claude L. Davis, Jr., Kenneth Edward Hrdina, Robert Sabia | 2002-10-15 |
| 6388745 | Detecting inclusions in transparent sheets | C. Charles Yu | 2002-05-14 |
| 6375551 | Angstrom polishing of calcium fluoride optical VUV microlithography lens elements and preforms | Charles Michael Darcangelo, Robert Sabia, Paul J. Williamson | 2002-04-23 |
| 6322425 | Colloidal polishing of fused silica | Charles Michael Darcangelo, Robert Sabia | 2001-11-27 |
| 6159077 | Colloidal silica polishing abrasive | Robert Sabia | 2000-12-12 |
| 5776220 | Method and apparatus for breaking brittle materials | Roger A. Allaire, Harry Menegus, Bruce H. Raeder | 1998-07-07 |
| 5622540 | Method for breaking a glass sheet | — | 1997-04-22 |