Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6931097 | Extreme ultraviolet soft x-ray projection lithographic method system and lithographic elements | Kenneth Edward Hrdina | 2005-08-16 |
| 6776006 | Method to avoid striae in EUV lithography mirrors | Michael Best, Mary J. Edwards, Thomas William Hobbs, Gregory Murray | 2004-08-17 |
| 6576380 | Extreme ultraviolet soft x-ray projection lithographic method and mask devices | Kenneth Edward Hrdina, Robert Sabia, Harrie J. Stevens | 2003-06-10 |
| 6542224 | Silica-based light-weight EUV lithography stages | Bradford Ackerman, Bradley Frederick Bowden, Kenneth Edward Hrdina | 2003-04-01 |
| 6465272 | Extreme ultraviolet soft x-ray projection lithographic method and mask devices | Kenneth Edward Hrdina, Robert Sabia, Harrie J. Stevens | 2002-10-15 |
| 6176588 | Low cost light weight mirror blank | Michael Linder | 2001-01-23 |
| 5627676 | Birefringent glass waveplate containing copper halide crystals | Nicholas Francis Borrelli | 1997-05-06 |
| 5425046 | Optical collimating/polarizing device, method of making same and frequency stabilized laser using same | — | 1995-06-13 |