Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4405710 | Ion beam exposure of (g-Ge.sub.x -Se.sub.1-x) inorganic resists | Karanam Balasubramanyam | 1983-09-20 |
| 4266138 | Diamond targets for producing high intensity soft x-rays and a method of exposing x-ray resists | David A. Nelson | 1981-05-05 |