Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6251551 | Method and device for treating two-dimensional substrates, especially silicon slices (wafers), for producing microelectronic components | — | 2001-06-26 |
| 6225235 | Method and device for cleaning and etching individual wafers using wet chemistry | — | 2001-05-01 |
| 5964952 | Method of cleaning surfaces with water and steam | — | 1999-10-12 |
| 5083364 | System for manufacturing semiconductor substrates | Herbert Olbrich, Joseph Gentischer, Wolfgang Fruhauf, Johann Dorner, Gunther Breitschwerdt +2 more | 1992-01-28 |
| 5069155 | Apparatus for in-line lacquering of compact disks | Roland P. Zaiss | 1991-12-03 |
| 4979464 | Apparatus for treating wafers in the manufacture of semiconductor elements | Hans Muller-Uri | 1990-12-25 |