Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7134825 | Device for handling substrates inside and outside a clean room | Wolfgang Schmutz | 2006-11-14 |
| 5083364 | System for manufacturing semiconductor substrates | Herbert Olbrich, Wolfgang Fruhauf, Johann Dorner, Gunther Breitschwerdt, Horst Kunze-Concewitz +2 more | 1992-01-28 |